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Center for Intelligent Team Robotics & Human-Robot Collaboration

Bio-inspired Actuation & Sensing

Precision Mechatronics and Nanometrology: High-Precision Positioning, Piezoelectric Actuation, and Intelligent Robotic Systems

Principal Investigator: Shao-Kang Hung

Background

Micro/nano manufacturing, semiconductor inspection, and intelligent robotic applications require high-resolution sensing, robust actuation, and precision positioning. Prof. Hung’s prior work on AFM nanometrology, piezoelectric nano-stepping motors, FPCB actuation, and long-endurance tether-powered UAVs provides a foundation for cross-scale mechatronic system integration.

 

Research Objectives

To develop key mechatronic modules for precision metrology, micro-positioning, and robotics; improve positioning resolution, metrology automation, system reliability, and manufacturability; and accelerate deployment in precision equipment, smart manufacturing, and inspection/rescue applications.

 

Methods

The technical approach combines mechanism design, piezoelectric/electromagnetic actuation, flexure mechanisms, visual servoing, automatic control, and system integration. Sensors, actuators, controllers, and mechanical structures will be integrated into testable, demonstrable, and transferable prototypes.

 

Innovation

The innovation lies in manufacturable and modular mechatronic designs that bridge nanoscale positioning/metrology and macroscale robotic applications, while introducing FPCB actuation, origami-inspired mechanisms, and tether-powered operation into new actuation and long-duration platforms.

 

Expected Outcomes

Expected outcomes include precision positioning/metrology modules, robotic prototypes, transferable core technologies, publications/patents, and industry collaboration topics that strengthen the center’s capabilities in precision mechatronics, smart manufacturing, and robotic applications.